Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow / V. Sedov, A. Popovich, S. A. Linnik [et al.]
Уровень набора: CoatingsЯзык: английский.Страна: .Резюме или реферат: A combination of two methods of chemical vapor deposition (CVD) of diamond films, microwave plasma–assisted (MW CVD) and hot filament (HF CVD), was used for the growth of 100 µm-thick polycrystalline diamond (PCD) layers on Si substrates. The bow of HF CVD and MW CVD films showed opposite convex\concave trends; thus, the combined material allowed reducing the overall bow by a factor of 2–3. Using MW CVD for the growth of the initial 25 µm-thick PCD layer allowed achieving much higher thermal conductivity of the combined 110 µm-thick film at 210 W/m?K in comparison to 130 W/m?K for the 93 µm-thick pure HF CVD film..Примечания о наличии в документе библиографии/указателя: [References: 56 tit.].Тематика: электронный ресурс | труды учёных ТПУ | diamond | thin film | chemical vapor deposition | microwave plasma | thermal conductivity | Raman spectroscopy | алмаз | тонкие пленки | химическое осаждение | микроволновая плазма | теплопроводность | рамановская спектроскопия Ресурсы он-лайн:Щелкните здесь для доступа в онлайн | Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
Title screen
[References: 56 tit.]
A combination of two methods of chemical vapor deposition (CVD) of diamond films, microwave plasma–assisted (MW CVD) and hot filament (HF CVD), was used for the growth of 100 µm-thick polycrystalline diamond (PCD) layers on Si substrates. The bow of HF CVD and MW CVD films showed opposite convex\concave trends; thus, the combined material allowed reducing the overall bow by a factor of 2–3. Using MW CVD for the growth of the initial 25 µm-thick PCD layer allowed achieving much higher thermal conductivity of the combined 110 µm-thick film at 210 W/m?K in comparison to 130 W/m?K for the 93 µm-thick pure HF CVD film.
Для данного заглавия нет комментариев.
Личный кабинет оставить комментарий.